第一章：晶体结构 (附件4 硅各向异性腐蚀）.pdf
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BasicBasic 22 Anisotropic Wet-etching of Silicon: Characterization and ModelingModeling ofof ChangeableChangeable Anisotropypy ProfProf. KK. SatoSato
Dept. of Micro/Nano Systems Engineering Nagoya University Basic 2 Anisotropic Wet-etching of Silicon: Prof. K. Sato Characterization and Modeling of Changeable Anisotropy COE for Education and Research of Micro-Nano Mechatronics Na o a Universit
Orientation Dependent Etching
(Conventional Products) 〈110〉 〈111〉 〈112〉 〈〈110000〉〉 SSiiOO22 〈111〉 Si Diaphragm Deep grooves on a (110) wafer Diaphragm on a (100) wafer Basic 2 Anisotropic Wet-etching of Silicon: Prof. K. Sato Characterization and Modeling of Changeable Anisotropy COE for Education and Research of Micro-Nano Mechatronics Na o a Universit
Variation in etching profile on (100) silicon wa